书目名称 | Metal Impurities in Silicon- and Germanium-Based Technologies |
副标题 | Origin, Characteriza |
编辑 | Cor Claeys,Eddy Simoen |
视频video | |
概述 | Offers an essential survey of controlling defects in semiconductor devices.Discusses different metals and important processing technologies in semiconductor devices.Discusses the interest in (Si)Ge fo |
丛书名称 | Springer Series in Materials Science |
图书封面 |  |
描述 | This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed.. .The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.. |
出版日期 | Book 2018 |
关键词 | Metal Gettering; Metal Precipitation and Segregation; Defects and Device Performance; Defect Engineerin |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-319-93925-4 |
isbn_softcover | 978-3-030-06747-2 |
isbn_ebook | 978-3-319-93925-4Series ISSN 0933-033X Series E-ISSN 2196-2812 |
issn_series | 0933-033X |
copyright | Springer International Publishing AG, part of Springer Nature 2018 |