Titlebook: MEMS Reliability; Allyson L. Hartzell,Mark G. da Silva,Herbert R. Sh Book 2011 Springer Science + Business Media, LLC 2011 MEMS.MEMS relia

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Testing and Standards for Qualification,Development of the product itself and test platforms that quantify the test distribution of MEMS parts is critical to produce the product. If the part test distributions all fall within the production specification then 100% yield is achieved, the ultimate goal for any manufacturing line (Chapter 7).

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Root Cause and Failure Analysis,nt of the failure is crucial to achieving a low field failure rate while the root cause is determined and the proper corrective action is developed, checked for effectiveness, and then finally implemented into production.

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Book 2011Ms Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing..

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