| 书目名称 | Lecture Notes on Principles of Plasma Processing | | 编辑 | Francis F. Chen,Jane P. Chang | | 视频video | | | 图书封面 |  | | 描述 | .Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes..This short book is ideal for new workers in the semiconductor indus | | 出版日期 | Book 2003 | | 关键词 | Plasma; Vakuuminjektionsverfahren; chemical engineering; chemistry; color; dielectrics; plasma physics; sem | | 版次 | 1 | | doi | https://doi.org/10.1007/978-1-4615-0181-7 | | isbn_softcover | 978-0-306-47497-2 | | isbn_ebook | 978-1-4615-0181-7 | | copyright | Springer Science+Business Media New York 2003 |
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发表于 2025-3-21 17:06:30
