| 书目名称 | Laser-Assisted Microtechnology |
| 编辑 | Simeon M. Metev,Vadim P. Veiko |
| 视频video | |
| 概述 | Übersicht über die Laser-Anwendungen in der Mikro-.Nanotechnologie mit praktischen Ergebnissen. |
| 丛书名称 | Springer Series in Materials Science |
| 图书封面 |  |
| 描述 | .Laser-Assisted Microtechnology. introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications. |
| 出版日期 | Book 1998Latest edition |
| 关键词 | Laser Melting; Laser Microtechnology; Microprocessing; Microtechnology; Patterning; deposition; film; laser |
| 版次 | 2 |
| doi | https://doi.org/10.1007/978-3-642-87271-6 |
| isbn_softcover | 978-3-642-87273-0 |
| isbn_ebook | 978-3-642-87271-6Series ISSN 0933-033X Series E-ISSN 2196-2812 |
| issn_series | 0933-033X |
| copyright | Springer-Verlag Berlin Heidelberg 1998 |
发表于 2025-3-21 19:40:05
