书目名称 | Laser-Assisted Microtechnology |
编辑 | Simeon M. Metev,Vadim P. Veiko |
视频video | |
丛书名称 | Springer Series in Materials Science |
图书封面 |  |
描述 | .Laser-Assisted Microtechnology. deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization. |
出版日期 | Book 19941st edition |
关键词 | Laser Microtechnology; Microprocessing; Microtechnology; ablation; analog; circuit; design; electromagnetic |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-642-97327-7 |
isbn_ebook | 978-3-642-97327-7Series ISSN 0933-033X Series E-ISSN 2196-2812 |
issn_series | 0933-033X |
copyright | Springer-Verlag Berlin Heidelberg 1994 |