Titlebook: Inflation Decade, 1910—1920; Americans Confront t David I. Macleod Book 2024 The Editor(s) (if applicable) and The Author(s), under exclusi

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David I. Macleodr design and optimization for multiscale process systems not.Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semicond

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David I. Macleodperation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly coupled macroscopic and microscopic phenomena. Drawing from recent advances in the dynamics and control of distributed parameter processes for which contin

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David I. Macleodperation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly coupled macroscopic and microscopic phenomena. Drawing from recent advances in the dynamics and control of distributed parameter processes for which contin

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