Titlebook: High Resolution Focused Ion Beams: FIB and its Applications; The Physics of Liqui Jon Orloff,Mark Utlaut,Lynwood Swanson Book 2003 Springer

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Introduction, belief that the practice of focused ion beam technology is so important that its users should know a lot about its theoretical underpinnings. The fact that the practice of focused ion beam technology is so widespread makes it easy to justify the effort spent on development of the theory of the liqu

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Physics of Liquid Metal Ion Sources,his chapter is divided into three parts. In part A the principles of operation of the LMIS are discussed; in part B the properties of LMIS are treated; and in part C emitter fabrication techniques are discussed. We are presenting a historical development of the understanding of LMIS because the hist

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Interactions of Ions with Solids,ng from 5 keV – 150 keV. In the interaction of the ion beam with a solid there are a relatively small number of physical processes which occur that determine what can be done with the beam. Ion-solid interactions are substantially different than electron-solid interactions, due mostly to the intrins

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Applications of Focused Ion Beams,th currents of lpA-3OnA)which can be focused into diameters smaller than 10nm with current densities of several A/cm.. The predominate use of these systems has been in various aspects of IC fabrication. The two main features of the FIB tool that are most important are the capability to remove materi

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https://doi.org/10.1007/978-1-4615-0765-9liquid; metals; optics; physics