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Titlebook: Helium Ion Microscopy; Gregor Hlawacek,Armin Gölzhäuser Book 2016 Springer International Publishing Switzerland 2016 Atomic scale simulati

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Monte Carlo Simulations of Focused Ion Beam Induced Processingials modification and fabrication with a higher spatial resolution by using helium and neon ions. In recent years, various experimental and numerical simulation approaches have been developed and implemented to broaden the applications of focused ion beam technology. The Monte Carlo (MC) simulation
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Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.
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Introduction to Imaging Techniques in the HIM explores the various ways this is implemented by first describing the numerous imaging signals and contrast mechanisms available and then giving an overview of some practical HIM imaging techniques. Several examples from the literature are used to illustrate the important imaging modes including hi
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Channeling and Backscatter Imagingn and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As a
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