Titlebook: Handbook of Laser Micro- and Nano-Engineering; Koji Sugioka Reference work 2021 Springer Nature Switzerland AG 2021 Laser Additive Process

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Laser Coupling and Relaxation of the Absorbed Energy: Metals, Semiconductors, and Dielectricstermines the material response and hence the character of the processing. In this chapter, a basic introduction to the physics of light–matter interaction is provided. The coupling, as well as the relaxation, depend strongly on the material type. For metals, the absorption is mainly linear and the m

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Laser-Induced Thermal Processes: Heat Transfer, Generation of Stresses, Melting and Solidification, e of thermal processes triggered by the laser energy deposition as well as subsequent transport processes involving electrons and phonons. This chapter provides a review of the fundamental mechanisms, thermodynamic driving forces, and kinetics of thermal processes involved in laser-material interact

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Excimer Lasers for Lithography and Annealingfor lithography is described in detail. The detailed technologies include spectral line narrowing, discharge in high pressure toxic gas, pulsed power circuit with solid state switching device, high repetition rate excitation technology by reducing shockwave in the chamber, shorter wavelength technol

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