| 书目名称 | Flash Lamp Annealing |
| 副标题 | From Basics to Appli |
| 编辑 | Lars Rebohle,Slawomir Prucnal,Denise Reichel |
| 视频video | |
| 概述 | Presents a detailed introduction to the flash lamp annealing technology and its physical background..Addresses advantages, drawbacks and process issues in detail and allows the reader to properly plan |
| 丛书名称 | Springer Series in Materials Science |
| 图书封面 |  |
| 描述 | .This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.. |
| 出版日期 | Book 2019 |
| 关键词 | Millisecond annealing; FLA assisted deposition; Semiconductor nanostructures; Transparent conducting ox |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-030-23299-3 |
| isbn_softcover | 978-3-030-23301-3 |
| isbn_ebook | 978-3-030-23299-3Series ISSN 0933-033X Series E-ISSN 2196-2812 |
| issn_series | 0933-033X |
| copyright | Springer Nature Switzerland AG 2019 |
发表于 2025-3-21 16:33:10
