| 书目名称 | Electroceramic-Based MEMS |
| 副标题 | Fabrication-Technolo |
| 编辑 | Nava Setter |
| 视频video | |
| 概述 | There are a number of excellent books and handbooks on state of art MEMS technology and applications but there is no book yet (and very few book chapters) on MEMS with functional ceramic films..This i |
| 丛书名称 | Electronic Materials: Science & Technology |
| 图书封面 |  |
| 描述 | .The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics:..Part A: Applications and devices with electroceramic-based MEMS:..Chemical microsensors ..Microactuators based on thin films ..Micromachined ultrasonic transducers ..Thick-film piezoelectric and magnetostrictive devices ..Pyroelectric microsystems ..RF bulk acoustic wave resonators and filters ..High frequency tunable devices..MEMS for optical functionality ..Part B: Materials, fabrication technology, and functionality:..Ceramic thick films for MEMS ..Piezoelectric thin films for MEMS..Materials and technology in thin films for tunable high frequency devices ..Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics ..Microfabrication of piezoelectric MEMS ..Nano patterning methods for electroceramics..Soft lithography em |
| 出版日期 | Book 2005 |
| 关键词 | Sensor; ceramics; communication; electronics; ferroelectrics; microelectromechanical system (MEMS); thin f |
| 版次 | 1 |
| doi | https://doi.org/10.1007/b101200 |
| isbn_softcover | 978-1-4419-3604-2 |
| isbn_ebook | 978-0-387-23319-2Series ISSN 1386-3290 |
| issn_series | 1386-3290 |
| copyright | Springer-Verlag US 2005 |
发表于 2025-3-21 18:44:38
