书目名称 | Dynamics of Microelectromechanical Systems | 编辑 | Nicolae Lobontiu | 视频video | | 概述 | Focuses on the mechanical domain (specifically, the quasi-static sub-domain), which is at the core of most of the MEMS.Provides a more in-depth look at the main problems that involve reliable modeling | 丛书名称 | Microsystems | 图书封面 |  | 描述 | .Dynamics of Microelectromechanical Systems. is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission...Features of this work include:....An in-depth treatment of problems that involve reliable modeling, analysis and design,....Analytical models with correct dependences on service dimensions,....Cantilever based systems for nanofabrication researchers and designers, and....Dynamics of complex spring and beam microsystems...This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book,. Mechanics of Microelectromechanical Systems,. by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. An instructor‘s solution manual is available on the book‘s webpage at springer.com....Dynamics of Microelectromechanical Systems. is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.. | 出版日期 | Textbook 2007 | 关键词 | Dynamics; Electrical; Lobontiu; MEMS; Micro; Nano; Vibrations; design; frequency-domain analysis; impedance; m | 版次 | 1 | doi | https://doi.org/10.1007/978-0-387-68195-5 | isbn_softcover | 978-1-4419-4225-8 | isbn_ebook | 978-0-387-68195-5Series ISSN 1389-2134 | issn_series | 1389-2134 | copyright | Springer-Verlag US 2007 |
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