书目名称 | Diffusion in Semiconductors |
编辑 | D. L. Beke |
视频video | |
概述 | Includes supplementary material: |
丛书名称 | Landolt-Börnstein: Numerical Data and Functional Relationships in Science and Technology - New Serie |
图书封面 |  |
描述 | Subvolume A of two subvolumes on .Diffusion in Semiconductors. .and Non-Metallic Solids. consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors. Although most of the silicides are not semiconducting, this chapter is included here because a number of them have become integrated in the Si technology and because they were not covered in the previous volume III/26 on diffusion in metallic substances. Subvolume A contains a CD-ROM. |
出版日期 | Book 1998Latest edition |
关键词 | Halbleiter; Halbleiterdiffusion; diffusion in semiconductors; semiconductor; semiconductors |
版次 | 1 |
doi | https://doi.org/10.1007/b53031 |
isbn_ebook | 978-3-540-49748-6Series ISSN 1615-1844 Series E-ISSN 1616-9522 |
issn_series | 1615-1844 |
copyright | Springer-Verlag Berlin Heidelberg 1998 |