| 书目名称 | Design and Manufacturing of Active Microsystems |
| 编辑 | Stephanus Büttgenbach,Arne Burisch,Jürgen Hesselba |
| 视频video | |
| 概述 | State-of-the-art design and application of electromagnetic microactuators.Newly developed microproduction technologies.Includes supplementary material: |
| 丛书名称 | Microtechnology and MEMS |
| 图书封面 |  |
| 描述 | This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems. |
| 出版日期 | Book 2011 |
| 关键词 | TCAD; Technical CAD; UV-depth lithography; magnetic microsystems; mechanical micromaching; microactuators |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-642-12903-2 |
| isbn_softcover | 978-3-642-26738-3 |
| isbn_ebook | 978-3-642-12903-2Series ISSN 1615-8326 Series E-ISSN 2365-0680 |
| issn_series | 1615-8326 |
| copyright | Springer-Verlag Berlin Heidelberg 2011 |
发表于 2025-3-21 17:00:28
