| 书目名称 | Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester | | 编辑 | Shanky Saxena,Ritu Sharma,B. D. Pant | | 视频video | | | 概述 | Serves as a complete guide from design, FEM, and fabrication to characterization.Presents basic insights into the mask design and fabrication details.Includes 101 colored images to understand key tech | | 丛书名称 | Energy Systems in Electrical Engineering | | 图书封面 |  | | 描述 | .This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures – single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic, and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process.. | | 出版日期 | Book 2021 | | 关键词 | Piezoelectric Energy Harvesters; Cantilever Beam; MEMS Device; Microelectronics; Piezoelectric Sensors; E | | 版次 | 1 | | doi | https://doi.org/10.1007/978-981-16-0606-9 | | isbn_softcover | 978-981-16-0608-3 | | isbn_ebook | 978-981-16-0606-9Series ISSN 2199-8582 Series E-ISSN 2199-8590 | | issn_series | 2199-8582 | | copyright | The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Singapor |
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发表于 2025-3-21 19:57:53
