书目名称 | Control and Optimization of Multiscale Process Systems |
编辑 | Panagiotis D. Christofides,Antonios Armaou,Amit Va |
视频video | |
概述 | First book published on the subject of control and optimization of multiscale process systems.Includes new techniques for feedback controller design and optimization for multiscale process systems not |
丛书名称 | Control Engineering |
图书封面 |  |
描述 | .Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly coupled macroscopic and microscopic phenomena. Drawing from recent advances in the dynamics and control of distributed parameter processes for which continuum laws are applicable as well as stochastic modeling of phenomena at mesoscopic/microscopic length scales, control and optimization of multiscale process systems has evolved into a very active research area of systems and control engineering...This book—the first of its kind—presents general methods for feedback controller synthesis and optimization of multiscale systems, illustrating their application to thin-film growth, sputtering processes, and catalytic systems of industrial interest. Beginning with an introduction to general issues on control and optimization of multiscale systems and a review of previous work in this area, the book discusses detailed modeling approaches for multiscale processes with emphasis on the theory and imple |
出版日期 | Book 2009 |
关键词 | Simulation; algorithm; algorithms; control engineering; dynamic optimization; feedback controllers; kineti |
版次 | 1 |
doi | https://doi.org/10.1007/978-0-8176-4793-3 |
isbn_ebook | 978-0-8176-4793-3Series ISSN 2373-7719 Series E-ISSN 2373-7727 |
issn_series | 2373-7719 |
copyright | Birkhäuser Boston 2009 |