Titlebook: Buildings for Advanced Technology; Ahmad Soueid,E. Clayton Teague,James Murday Book 2015 Springer International Publishing Switzerland 201

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Grenzwerte von Funktionen und Stetigkeitparticle concentration are briefly described. This is followed by an overview of cleanroom design principles and the filtering systems employed to achieve the various standards of air cleanliness in the cleanrooms.

conception

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Introduction,neering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulating matter at this length scale. Nanostructured materials can exhibit unusual physical, chemical, and biological properties and can enable novel applications not possible in bulk materials of the same chemica

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Design Criteria,ent must be maintained for optimal performance. The cutting edge science of measurement and manipulation on an atomic scale requires extraordinary environmental stability. In large measure, many of the nanotechnology research accomplishments are due to facilities built to meet the stringent requirem

Morsel

Temperature and Humidity Control,imary focus of this chapter is temperature and humidity control, two of the most critical variables that affect work at the nanometer scale. In basic science laboratories, environmental control to an accuracy of ±0.5 to 0.25 °C and ±5 to 10 % relative humidity (RH) is adequate. For atomic-scale meas

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Vibration Isolation,rate or propagate vibration that is detrimental to research activities. The environment itself must be considered as an experimental variable and constrained to known and closely controlled values. For “routine measurements” the requirement is root mean square (RMS) amplitude displacement of 0.025 m

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