期刊全称 | Bringing Scanning Probe Microscopy up to Speed | 影响因子2023 | S. C. Minne,S. R. Manalis,C. F. Quate | 视频video | | 学科分类 | Microsystems | 图书封面 |  | 影响因子 | .Bringing Scanning Probe Microscopy Up to Speed. introducesthe principles of scanning probe systems with particular emphasis ontechniques for increasing speed. The authors include usefulinformation on the characteristics and limitations of currentstate-of-the-art machines as well as the properties of the systemsthat will follow in the future. The basic approach is two-fold. First,fast scanning systems for single probes are treated and, second,systems with multiple probes operating in parallel are presented..The key components of the SPM are the mechanical microcantilever withintegrated tip and the systems used to measure its deflection. Inessence, the entire apparatus is devoted to moving the tip over asurface with a well-controlled force. The mechanical response of theactuator that governs the force is of the utmost importance since itdetermines the scanning speed. The mechanical response relatesdirectly to the size of the actuator; smaller is faster. Traditionalscanning probe microscopes rely on piezoelectric tubes of centimetersize to move the probe. In future scanning probe systems, the largeactuators will be replaced with cantilevers where the actuators areintegrated on the be | Pindex | Book 1999 |
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