Overview: Serves as a complete guide from design, FEM, and fabrication to characterization.Presents basic insights into the mask design and fabrication details.Includes 101 colored images to understand key tech.This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harv
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