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Submitted on: 25 September 2024.
Revised on: 14 November 2024.
Accepted on: 07 December 2024.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 16 November 2001.
Revised on: 27 January 2002.
Accepted on: 07 March 2002.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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