Submitted on: 03 September 2007.
Revised on: 23 November 2007.
Accepted on: 12 January 2008.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 07 August 2004.
Revised on: 22 October 2004.
Accepted on: 10 November 2004.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 24 November 2001.
Revised on: 02 February 2002.
Accepted on: 18 March 2002.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 10 September 2010.
Revised on: 26 November 2010.
Accepted on: 24 December 2010.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 08 May 2010.
Revised on: 23 June 2010.
Accepted on: 09 July 2010.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 18 July 2024.
Revised on: 16 September 2024.
Accepted on: 15 October 2024.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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