Submitted on: 10 November 2005.
Revised on: 02 February 2006.
Accepted on: 10 March 2006.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 14 May 2007.
Revised on: 25 June 2007.
Accepted on: 29 July 2007.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 18 May 1998.
Revised on: 20 August 1998.
Accepted on: 16 September 1998.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 14 September 2015.
Revised on: 10 November 2015.
Accepted on: 04 December 2015.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 16 February 2010.
Revised on: 27 March 2010.
Accepted on: 11 April 2010.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 28 July 2017.
Revised on: 21 November 2017.
Accepted on: 21 December 2017.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 23 February 2006.
Revised on: 29 March 2006.
Accepted on: 13 May 2006.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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