SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)影响因子<br> http://impactfactor.cn/2024/if/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)影响因子@(工程,电气和电子)学科排名<br> http://impactfactor.cn/2024/ifr/?ISSN=1057D7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)总引论文<br> http://impactfactor.cn/2024/at/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)总引论文@(工程,电气和电子)学科排名<br> http://impactfactor.cn/2024/atr/?ISSN=1057D7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)影响因子<br> http://impactfactor.cn/2024/tc/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)总引频次@(工程,电气和电子)学科排名<br> http://impactfactor.cn/2024/tcr/?ISSN=1057D7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)即时影响因子<br> http://impactfactor.cn/2024/ii/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)即时影响因子@(工程,电气和电子)学科排名<br> http://impactfactor.cn/2024/iir/?ISSN=1057D7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)五年累积影响因子<br> http://impactfactor.cn/2024/5y/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)五年累积影响因子@(工程,电气和电子)学科排名<br> http://impactfactor.cn/2024/5yr/?ISSN=1057D7157<br><br>
Submitted on: 14 May 2006.
Revised on: 24 August 2006.
Accepted on: 19 October 2006.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 11 December 2022.
Revised on: 14 January 2023.
Accepted on: 11 March 2023.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 06 November 2009.
Revised on: 29 December 2009.
Accepted on: 02 February 2010.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 21 May 2007.
Revised on: 04 August 2007.
Accepted on: 22 August 2007.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 12 September 2014.
Revised on: 06 December 2014.
Accepted on: 31 December 2014.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 28 November 2011.
Revised on: 08 January 2012.
Accepted on: 03 February 2012.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS