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Submitted on: 10 November 2000.
Revised on: 11 December 2000.
Accepted on: 19 January 2001.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 11 August 2001.
Revised on: 01 September 2001.
Accepted on: 30 October 2001.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 15 January 2011.
Revised on: 10 May 2011.
Accepted on: 24 May 2011.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 13 June 2021.
Revised on: 03 September 2021.
Accepted on: 26 September 2021.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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