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Submitted on: 22 November 2013.
Revised on: 14 December 2013.
Accepted on: 11 January 2014.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 12 April 2024.
Revised on: 22 June 2024.
Accepted on: 15 August 2024.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 23 November 1998.
Revised on: 08 January 1999.
Accepted on: 06 February 1999.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 31 October 2004.
Revised on: 02 February 2005.
Accepted on: 28 March 2005.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 11 February 2018.
Revised on: 09 March 2018.
Accepted on: 30 April 2018.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS