Submitted on: 11 March 2021.
Revised on: 05 July 2021.
Accepted on: 01 August 2021.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 26 November 2014.
Revised on: 25 March 2015.
Accepted on: 06 May 2015.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 29 January 2009.
Revised on: 21 February 2009.
Accepted on: 20 March 2009.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 17 September 2015.
Revised on: 24 November 2015.
Accepted on: 21 January 2016.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 04 July 2003.
Revised on: 12 September 2003.
Accepted on: 07 October 2003.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS