http://reply.papertrans.cn/2/181/18044/18044-11.png
Submitted on: 02 November 2018.
Revised on: 05 February 2019.
Accepted on: 19 March 2019.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
http://reply.papertrans.cn/2/181/18044/18044-13.png
http://reply.papertrans.cn/2/181/18044/18044-14.png
Submitted on: 30 August 2011.
Revised on: 08 November 2011.
Accepted on: 22 December 2011.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 07 August 2002.
Revised on: 12 November 2002.
Accepted on: 01 December 2002.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
http://reply.papertrans.cn/2/181/18044/18044-17.png
http://reply.papertrans.cn/2/181/18044/18044-18.png
http://reply.papertrans.cn/2/181/18044/18044-19.png
http://reply.papertrans.cn/2/181/18044/18044-20.png