Submitted on: 07 December 2003.
Revised on: 28 January 2004.
Accepted on: 21 February 2004.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 23 September 2009.
Revised on: 12 January 2010.
Accepted on: 06 February 2010.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 10 November 2008.
Revised on: 25 December 2008.
Accepted on: 07 January 2009.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS