Submitted on: 10 September 2013.
Revised on: 30 October 2013.
Accepted on: 12 December 2013.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 23 January 2014.
Revised on: 18 March 2014.
Accepted on: 02 April 2014.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 18 September 2023.
Revised on: 29 November 2023.
Accepted on: 19 January 2024.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 13 May 2016.
Revised on: 31 July 2016.
Accepted on: 06 September 2016.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 23 January 2019.
Revised on: 11 March 2019.
Accepted on: 15 April 2019.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Submitted on: 16 November 2011.
Revised on: 06 March 2012.
Accepted on: 21 March 2012.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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