SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)影响因子<br> http://impactfactor.cn/2024/if/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)影响因子@(应用物理学)学科排名<br> http://impactfactor.cn/2024/ifr/?ISSN=1057C7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)总引论文<br> http://impactfactor.cn/2024/at/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)总引论文@(应用物理学)学科排名<br> http://impactfactor.cn/2024/atr/?ISSN=1057C7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)影响因子<br> http://impactfactor.cn/2024/tc/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)总引频次@(应用物理学)学科排名<br> http://impactfactor.cn/2024/tcr/?ISSN=1057C7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)即时影响因子<br> http://impactfactor.cn/2024/ii/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)即时影响因子@(应用物理学)学科排名<br> http://impactfactor.cn/2024/iir/?ISSN=1057C7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(20 21 REV HIST)五年累积影响因子<br> http://impactfactor.cn/2024/5y/?ISSN=1057-7157<br><br> SCIE(SCI)期刊JOURNAL OF MICROELECTROMECHANICAL SYSTEMS(J MICROELECTROMECH S)五年累积影响因子@(应用物理学)学科排名<br> http://impactfactor.cn/2024/5yr/?ISSN=1057C7157<br><br>
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Submitted on: 09 February 2014.
Revised on: 05 June 2014.
Accepted on: 29 July 2014.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 23 December 2023.
Revised on: 14 February 2024.
Accepted on: 07 April 2024.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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Submitted on: 07 September 2012.
Revised on: 15 December 2012.
Accepted on: 11 January 2013.
___________________JOURNAL OF MICROELECTROMECHANICAL SYSTEMS