Titlebook: Sputtering by Particle Bombardment; Experiments and Comp Rainer Behrisch,Wolfgang Eckstein Book 2007 Springer-Verlag Berlin Heidelberg 2007

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书目名称Sputtering by Particle Bombardment影响因子(影响力)




书目名称Sputtering by Particle Bombardment影响因子(影响力)学科排名




书目名称Sputtering by Particle Bombardment网络公开度




书目名称Sputtering by Particle Bombardment网络公开度学科排名




书目名称Sputtering by Particle Bombardment被引频次




书目名称Sputtering by Particle Bombardment被引频次学科排名




书目名称Sputtering by Particle Bombardment年度引用




书目名称Sputtering by Particle Bombardment年度引用学科排名




书目名称Sputtering by Particle Bombardment读者反馈




书目名称Sputtering by Particle Bombardment读者反馈学科排名

Reservation

Computer Simulation of the Sputtering Process,collision cascades can be followed with computer programs and with the Boltzmanntransport equation. The two main approaches with computer programs are thebinary collision approximation (BCA) and molecular dynamics (MD); they are bothbased on classical dynamics. Programs based on BCA describe sputter

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Energy and Angular Distributions of Sputtered Species,nd organicsolids) are discussed. Bombardment energies in the range from a few 10 eV toroughly 100 keV are considered, covering irradiation conditions for whichnuclear (elastic) collisions dominate the energy dissipation processes. In thelinear cascade regime, energy spectra of neutral, excited, and

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Chemical Sputtering,actions betweentarget and projectile atoms may form species which are more loosely boundto the surface and more easily sputtered. This causes an increase of thesputtering yield. This process is usually subsumed under the expression chemicalsputtering. Otherwise, newly formed compounds may posses an

省略

Electronic Sputtering with Swift Heavy Ions, not byelastic collision cascades. Given by the high energy input per incident ion, themeasurements of sputtering yields include specific problems and requiredifferent techniques than for nuclear sputtering. Electronic sputtering shows astrong dependence on material properties, therefore experimenta

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Book 2007ork has been performed and published in international journals. The planned book brings an overview about all the new results. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the

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Computer Simulation of the Sputtering Process,m with all the atomsin some surrounding. The BCA approach can be regarded to be based on’sequential event logic’, whereas the MD approach is based on ’multipleinteraction logic’ according to Harrison [1]. Both approaches have advantages anddisadvantages [2, 3].