| 书目名称 | Semiconductor Lithography | | 副标题 | Principles, Practice | | 编辑 | Wayne M. Moreau | | 视频video | | | 丛书名称 | Microdevices | | 图书封面 |  | | 描述 | Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated circuit in a resist material. The pattern is formed and overlayed to a previous circuit layer as many as 30 times in the manufacture of logic and memory devices. With the resist pattern acting as a mask, a permanent device structure is formed by subtractive (removal) etching or by additive deposition of metals or insulators. Each process step in lithography uses inorganic or organic materials to physically transform semiconductors of silicon, insulators of oxides, nitrides, and organic polymers, and metals, into useful electronic devices. All forms of electromagnetic radiation are used in the processing. Lithography is a mUltidisciplinary science of materials, processes, and equipment, interacting to produce three-dime | | 出版日期 | Book 1988 | | 关键词 | circuit; electrical engineering; integrated circuit; logic; manufacturing; semiconductor; transistor | | 版次 | 1 | | doi | https://doi.org/10.1007/978-1-4613-0885-0 | | isbn_softcover | 978-1-4612-8228-0 | | isbn_ebook | 978-1-4613-0885-0 | | copyright | Plenum Press, New York 1988 |
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发表于 2025-3-21 19:55:13
