| 书目名称 | Rare-Earth Implanted MOS Devices for Silicon Photonics |
| 副标题 | Microstructural, Ele |
| 编辑 | Lars Rebohle,Wolfgang Skorupa |
| 视频video | |
| 概述 | Summarizes the current knowledge in implanted rare earth materials.Includes structural microelectric device aspects.A reference work for researchers and engineers alike.Includes supplementary material |
| 丛书名称 | Springer Series in Materials Science |
| 图书封面 |  |
| 描述 | The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device characterization techniques are of general interest and are beyond the scope of this type of light emitter. The book will be of value to engineers, physicists, and scientists dealing either with Si based photonics in particular or optoelectronic device fabrication and characterization in general. |
| 出版日期 | Book 2010 |
| 关键词 | Electroluminescence; MOS technology; Nanocluster formation; Rare earth implantation; Si-based light emis |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-642-14447-9 |
| isbn_softcover | 978-3-642-26558-7 |
| isbn_ebook | 978-3-642-14447-9Series ISSN 0933-033X Series E-ISSN 2196-2812 |
| issn_series | 0933-033X |
| copyright | Springer-Verlag Berlin Heidelberg 2010 |
发表于 2025-3-21 19:43:13
