书目名称 | Radiation Effects in Advanced Semiconductor Materials and Devices |
编辑 | Cor Claeys,Eddy Simoen |
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概述 | This book summarizes the current knowledge of radiation defects in semiconductors.It will be a useful reference work for scientists involved in semiconductor processing.- This book is important for sp |
丛书名称 | Springer Series in Materials Science |
图书封面 |  |
描述 | In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today‘s device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments. |
出版日期 | Book 2002 |
关键词 | Microelectronics; Radiation damage; Semiconductor; Semiconductor devices and circuits; Space and nuclear |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-662-04974-7 |
isbn_softcover | 978-3-642-07778-4 |
isbn_ebook | 978-3-662-04974-7Series ISSN 0933-033X Series E-ISSN 2196-2812 |
issn_series | 0933-033X |
copyright | Springer-Verlag Berlin Heidelberg 2002 |