Titlebook: Microsystem Technology and Microrobotics; Sergej Fatikow,Ulrich Rembold Book 1997 Springer-Verlag Berlin Heidelberg 1997 Sensor.actuator.c

HAVOC

Microrobotics,mation processing unit. Although there have been enormous advancements on the component level there are very few complete microsystems available presently. The spectrum of potential microsystems is very broad and was already introduced in the introductory chapters. This chapter will be dedicated to

Junction

rate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in it

致敬

NOVA

Ideas and Problems of Microsystem Technology and Microrobotics,cessing units, enabling the overall system to sense, decide and react. MST can be defined as the functional integration of mechanical, electronic, optical and any other functional elements, using special MST techniques.

LANCE

Key Processes to Produce Micromechanical Components,ne. Micromechanics is concerned with manufacturing methods to produce small parts in the µm-range using special MST techniques, such as lithography, thin layer techniques, dry and wet etching, micromolding, etc.

sphincter

MST and Information Processing,en the microsystem and its surroundings as well as the many existing interconnection technologies and casing techniques will not be covered here. The interested reader may refer to [Koh194a] and [Menz93] where these topics are described in detail.

领先

Microsystem Technology Applications,control algorithms. Inexpensive mass production, a lower material content and low energy consumption will make the microproducts competitive economically; they will become more reliable with increasing degree of integration, and new functions will be created by using MST.

坦白

Book 1997d testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

gruelling

Archipelago