Titlebook: Metrology; Wei Gao Living reference work 20200th edition Process Control.Precision Length Sensors.Precision Angle Sensors.Surface Finish

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书目名称Metrology影响因子(影响力)




书目名称Metrology影响因子(影响力)学科排名




书目名称Metrology网络公开度




书目名称Metrology网络公开度学科排名




书目名称Metrology被引频次




书目名称Metrology被引频次学科排名




书目名称Metrology年度引用




书目名称Metrology年度引用学科排名




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书目名称Metrology读者反馈学科排名

男学院

Dimensional Metrology Using Mode-Locked Lasers, high spatial coherence, being suited to overcome the technical barriers long standing in 3-D profiling of rough surfaces. In summary, mode-locked lasers are now ready to lead the advance of dimensional metrology by providing unique temporal and spectral benefits over conventional continuous wave la

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Nanopositioning and Nanomeasuring Machines,surement performance at the limits of physics and technology, resulting from the progress and the goals of modern high-tech fabrication technologies. The fundamentals of the nanopositioning and nanomeasuring machine, developed at the Institute of Process Measurement and Sensor Technology of the Ilme

AFFIX

Culmination

Optical Sensors for Machine Tool Metrology,ne tools are largely affected by these two principles. This is the second topic highlighted in this chapter. Some small and low-cost optical sensors for geometric error measurements are presented. These sensors can be portably mounted onto the machine frame for online measurement. They can also be e

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Micro-dimensional Measurement by a Micro-probing System,robe tip ball of the micro-probing systems is composed with the high-accuracy microsphere, so that their diameter is smaller than the micrometric features of the measuring workpiece generally in order to realize good accessibility for complex features. Therefore, precise qualification of the probe t

Left-Atrium

Optical Scatterometry for Nanostructure Metrology,M in addressing devices with sub-wavelength feature sizes in semiconductor industry. This chapter aims to give the engineers and the graduates working in relevant fields some basic knowledge in optical scatterometry. Emphasis will be given to the two basic steps involved in the implementation of opt

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