| 书目名称 | Ion Implantation: Equipment and Techniques |
| 副标题 | Proceedings of the F |
| 编辑 | Heiner Ryssel,Hans Glawischnig |
| 视频video | http://file.papertrans.cn/476/475178/475178.mp4 |
| 丛书名称 | Springer Series in Electronics and Photonics |
| 图书封面 |  |
| 出版日期 | Conference proceedings 1983 |
| 关键词 | Apertur; Implantation; Ionenimplantation; Planar; Plantation; Plasmat; information; laser; metals; paper; poly |
| 版次 | 1 |
| doi | https://doi.org/10.1007/978-3-642-69156-0 |
| isbn_softcover | 978-3-642-69158-4 |
| isbn_ebook | 978-3-642-69156-0Series ISSN 0172-5734 |
| issn_series | 0172-5734 |
| copyright | Springer-Verlag Berlin Heidelberg 1983 |