书目名称 | Ion Implantation: Equipment and Techniques |
副标题 | Proceedings of the F |
编辑 | Heiner Ryssel,Hans Glawischnig |
视频video | http://file.papertrans.cn/476/475178/475178.mp4 |
丛书名称 | Springer Series in Electronics and Photonics |
图书封面 |  |
出版日期 | Conference proceedings 1983 |
关键词 | Apertur; Implantation; Ionenimplantation; Planar; Plantation; Plasmat; information; laser; metals; paper; poly |
版次 | 1 |
doi | https://doi.org/10.1007/978-3-642-69156-0 |
isbn_softcover | 978-3-642-69158-4 |
isbn_ebook | 978-3-642-69156-0Series ISSN 0172-5734 |
issn_series | 0172-5734 |
copyright | Springer-Verlag Berlin Heidelberg 1983 |