| 书目名称 | Ion Implantation in Semiconductors | | 副标题 | Proceedings of the I | | 编辑 | Ingolf Ruge (Professor an der Technischen Universi | | 视频video | http://file.papertrans.cn/476/475174/475174.mp4 | | 图书封面 |  | | 描述 | In recent years great progress has been made in the field of ion implantation, particularly with respect to applications in semiconductors. It would be impos sible not to note the growing interest in this field, both by research groups and those directly concerned with production of devices. Furthermore, as several papers have pointed out, ion implantation and its associated technologies promise exciting advances in the development of new kinds of devices and provide power ful new tools for materials investigations. It was, therefore, appropriate to arrange the II. International Conference on Ion Implantation in Semiconductors within the rather short time of one year since the first conference was held in 1970 in Thousand Oaks, California. Although ori ginally planned on a small scale with a very limited number of participants, more than two hundred scientists from 15 countries participated in the Conference which was held May 24 - 28, 1971 at the Congress Center in Garmisch-Partenkirchen. This volume contains the papers that were presented at the Conference. Due to the tremendous volume of research presented, publication here of all the works in full detail was not possible. Ma | | 出版日期 | Conference proceedings 1971 | | 关键词 | development; implant; implantat; implantation; production; research; stress | | 版次 | 1 | | doi | https://doi.org/10.1007/978-3-642-80660-5 | | isbn_softcover | 978-3-642-80662-9 | | isbn_ebook | 978-3-642-80660-5 | | copyright | Springer-Verlag, Berlin · Heidelberg 1971 |
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