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Titlebook: Initiatives of Precision Engineering at the Beginning of a Millennium; 10th International C Ichiro Inasaki Book 2002 Springer Science+Busin

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Influence of Micro Machining on Strength Degradation of a Silicon Nitride Ceramicmicro machining on the strength degradation. Dimpling by LBM can not be prevented from forming a sharp edge around the dimple, which may degrade the strength of the ceramic. The AJM dimple has a smooth-faced rounded shape, and only negligible deterioration of the strength takes place.
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Subnanometer Fabrication of Optics by Plasma Chemical Vaporization Machiningefore plasma CVM. To achieve subnanometer accuracy, the plasma CVM conditions were adjusted. Under these conditions, we successfully fabricated the mirrors with the desired shape accuracy of 0.63 nm RMS. This demonstrated that plasma CVM is capable of fabricating optics with subnanometer shape accuracy.
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Micro Structuring of High Aspect Ratio and Array by Means of Mechanical MachiningWe introduce the ultra-precision micro structuring of high aspect ratio and array by means of mechanical machining with ultra-precision machine tool and single-crystal diamond tool.
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Design Of New Precision Machine Elementsaded air bearings and self-compensating hydrostatic bearings. In addition, a new design concept for a low cost precision cylindrical grinding machine is introduced where the axis of motion carriages act as integral structural elements of the supporting frame to create a very small and rigid structural loop.
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