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Titlebook: Electron and Ion Optics; Miklos Szilagyi Book 1988 Plenum Press, New York 1988 Wafer.analog.circuit.computer.electromagnetic field.electro

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发表于 2025-3-21 18:57:28 | 显示全部楼层 |阅读模式
书目名称Electron and Ion Optics
编辑Miklos Szilagyi
视频videohttp://file.papertrans.cn/307/306175/306175.mp4
丛书名称Microdevices
图书封面Titlebook: Electron and Ion Optics;  Miklos Szilagyi Book 1988 Plenum Press, New York 1988 Wafer.analog.circuit.computer.electromagnetic field.electro
描述The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten­ ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially g
出版日期Book 1988
关键词Wafer; analog; circuit; computer; electromagnetic field; electromagnetic fields; energy; microwave; optics
版次1
doihttps://doi.org/10.1007/978-1-4613-0923-9
isbn_softcover978-1-4612-8247-1
isbn_ebook978-1-4613-0923-9
copyrightPlenum Press, New York 1988
The information of publication is updating

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the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially g978-1-4612-8247-1978-1-4613-0923-9
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Introductory Survey,chnologies are the well-known classical applications. Electron and ion microprobes, energy analyzers, electron spectrometers, and ion implanters are among the more recent practical results of the development of this rapidly growing field. Analytical chemistry and surface science could hardly exist w
发表于 2025-3-22 06:26:16 | 显示全部楼层
The Theory of Aberrations,e analyzed the operation of the long magnetic lens. We established the fact that a clear image can only be produced if the particles move close to the field lines. Otherwise, different particles will be focused at different points and the image will be blurred.
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,,Versuch Über die Pubertät‘ — Im Zentrum,e analyzed the operation of the long magnetic lens. We established the fact that a clear image can only be produced if the particles move close to the field lines. Otherwise, different particles will be focused at different points and the image will be blurred.
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An Iron Army for International Marketing,name expresses the close analogy between the transmission of light through refractive media and the motion of charged particles in electromagnetic fields. It is a huge field with a relatively short history. Although the analogy between classical mechanics and geometrical optics was discovered by Ham
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https://doi.org/10.1007/978-1-4612-2390-0 particle is defined by Eq. (1-14) and we also know that the force in general is defined by the Newtonian law of motion. where . = . is the particle’s momentum and.is the relativistic mass of the particle (m0 is its rest mass). Substituting the Lorentz force (1-14) and Eqs. (1-11) and (1-12) into Eq
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