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Titlebook: Amorphous and Crystalline Silicon Carbide IV; Proceedings of the 4 Cary Y. Yang,M. Mahmudur Rahman,Gary L. Harris Conference proceedings 19

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Growth Simulation of SiC Polytypes and Application to DPB-Free 3C-SiC on Alpha-SiC Substratesal growth of SiC. The Coulomb potential for atoms at two different sites on the surface of substrates, which induced by atomic arrays in substrates, was calculated by changing the interaction length. The dependence of surface potential on the stacking sequence of atoms in substrates was investigated
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Growth and Characterization of ,-SiC Films Grown on Si by Gas-Source Molecular Beam Epitaxyre obtained at temperatures as low as 1248 K, as confirmed by electron diffraction. The latter films were specularly reflective. However, SEM revealed growth pits extending to the SiC surface as well as preferential growth on the pit edges. Cross-sectional TEM analysis confirmed the epitaxial relati
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Atomic Layer Control of ,-SiC(001) Surface°C is observed both for Si.H. exposures onto a carbon terminated surface and for C.H. exposures onto a silicon covered surface. Further, about one monolayer of a silicon-covered surface is etched by exposing to oxygen at 1050°C. The resultant etched surface is carbon-covered surface.
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Growth and Characterization of 6H-SiC Bulk Crystals by the Sublimation Methoderials and pressure are reported in this paper. A SiC source with unintentional impurities resulted in the creation of a number of striated defects during the initial stage of crystal growth. Three kinds of etch pits (EP-1, EP-2 and EP-3) were observed. The incidence of small-size EP-3 etch pits was
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Liquid Phase Epitaxy of SiC-AlN Solid Solutionsthe concentration of the AlN component in the epitaxial layers range from 2 to 10 percent, depending on the growth conditions. Element’s distribution across the layer was uniform. X-ray difraction data indicated that layers are monocrystalline. Intense cathodoluminescence from the layers was recorde
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Comparison of Dilutely Doped p-Type 6H-SiC from a Variety of Sourcesitaxial single crystal films of 3C and 6H SiC from a variety of sources. We use a model based on group theory to argue that the origin of these lines is the recombination of an exciton in an acceptor four particle complex.
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Growth of Cubic Silicon Carbide on Silicon Using the C2HCl3-SiH4-H2 Systemting in extreme environments: high temperature, radiation etc. In recent years considerable progress has been achieved in fabrication of semiconductor devices in 3C-SiC. However, the problem of producing good-quality and low-cost substrates of large enough dimensions is still unsolved. CVD- growth o
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