Overview: Presents the instrument design details of atomic force microscopy with focus on active cantilever probes.Includes examples and exercises to boost understanding of AFM subsystem design, fabrication andFrom a perspective of precision instrumentation, this book provides a guided tour to readers on exploring the inner workings of atomic force microscopy (AFM). Centered around AFM, a broad range of mechatronic system topics are covered including mechanics, sensors, actuators, transmission design, system identification, signal processing, dynamic system modeling, controller. With a solid t
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