知识 发表于 2025-3-28 15:38:25

Introduction to Scanning Probe Lithography,d features in photosensitive polymers. Since photolithography is rapidly approaching fundamental resolution limitations, a new high-resolution patterning technique may be required to continue the industry’s trend toward higher performance electron devices, increased packing densities, and higher density memories.

Culmination 发表于 2025-3-28 19:47:51

Scanning Probe Tips for SPL,ent, the tips should be tall to ensure a small cantilever-to-sample capacitance. In this chapter we give details on different tip varieties: (1) “standard” silicon or metal-coated tips, (2) post-processed silicon tips, and (3) carbon nanotubes as scanning probe tips.

FLING 发表于 2025-3-29 02:50:19

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ANT 发表于 2025-3-29 03:08:12

Microsystemshttp://image.papertrans.cn/s/image/861161.jpg

CAMP 发表于 2025-3-29 10:50:14

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查看完整版本: Titlebook: Scanning Probe Lithography; Hyongsok T. Soh,Kathryn Wilder Guarini,Calvin F. Q Book 2001 Springer Science+Business Media New York 2001 Lei