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Vacuum Technology,gime. Typically, roughing pumps are displacement pumps, while high-vacuum pumps are either kinetic transfer pumps or entrapment pumps . General vacuum issues covered are the vacuum seal, vacuum measurement and analysis, as well as desorption and leaks. A discussion of vacuum pump applications concludes this chapter.oblique 发表于 2025-3-22 16:40:24
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f MNEMS.Includes supplementary material: .For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process teCRUMB 发表于 2025-3-23 00:11:28
Textbook 2015s book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control..殖民地 发表于 2025-3-23 04:56:30
Deposition Technologies,olyte) and subjected to electrochemical or chemical deposition. Spin-coating and spray-coating are two examples of technologies that lend themselves to creating organic films—a technology widely used in depositing photoresists in photolithography. Dip processes like solgel may be used for the creation of oxide coatings.软弱 发表于 2025-3-23 08:33:17
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