exceptional 发表于 2025-3-28 16:23:56

Hans H. Gatzen,Volker Saile,Jürg Leutholdesents the formalization of advanced knowledge concepts.This book focuses on one of the major challenges of the newly created scientific domain known as data science: turning data into actionable knowledge in order to exploit increasing data volumes and deal with their inherent complexity. Actionabl

新字 发表于 2025-3-28 21:07:51

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HILAR 发表于 2025-3-28 23:08:04

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Phagocytes 发表于 2025-3-29 04:08:15

,Introduction—MEMS, a Historical Perspective,ectrical signals to produce sensors and actuators. The first MEMS devices appeared in the early 1960s, soon after the invention of the integrated circuit (IC). A tiny pressure sensor, built by sensing strain on an etched thin-silicon diaphragm is an early example. Extensions of this seminal idea and

轻快带来危险 发表于 2025-3-29 08:55:16

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hieroglyphic 发表于 2025-3-29 13:09:32

Deposition Technologies,ike evaporation or ion bombardment to create thin-films on a substrate by forcing source atoms into a gaseous phase. Chemical vapor deposition (CVD) and similar processes create coatings by a chemical reaction of volatile species by using reaction processes defined by chemical reaction equations. Wh

Compatriot 发表于 2025-3-29 18:05:56

Etching Technologies,anical processes (without or with a chemical contribution). The wet etch attack may be chemical by a liquid etchant or electrochemical (a reversal of electrochemical deposition) by an electrolyte under the influence of a current. In physical dry etching, the substrate is bombarded by ions (ion beam
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查看完整版本: Titlebook: Micro and Nano Fabrication; Tools and Processes Hans H. Gatzen,Volker Saile,Jürg Leuthold Textbook 2015 Springer-Verlag Berlin Heidelberg 2