指责 发表于 2025-3-21 17:06:30

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朋党派系 发表于 2025-3-21 21:35:19

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营养 发表于 2025-3-22 00:43:14

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Chivalrous 发表于 2025-3-22 08:03:45

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decode 发表于 2025-3-22 08:56:43

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CLEFT 发表于 2025-3-22 13:29:11

ECR Sources,5 GHz. Both the large magnetic field of 875G and the microwave waveguide plumbing make these reactors more complicated and expensive than RIE reactors. Unless one uses tricky methods that depend on nonuniform magnetic fields and densities, microwaves cannot penetrate into a plasma if ω. > ω. Aτ 2.45

AND 发表于 2025-3-22 20:15:36

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流利圆滑 发表于 2025-3-22 23:13:49

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空中 发表于 2025-3-23 04:41:18

Discharge Equilibrium,roducing the right mixture of chemical species and the energy and flux of ions onto the substrate. For some processes, such as cleaning and stripping, simply a high density of oxygen would do; but for the more delicate etching processes, the proper equilibrium conditions are crucial. Reactor-scale n

激励 发表于 2025-3-23 07:52:11

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查看完整版本: Titlebook: Lecture Notes on Principles of Plasma Processing; Francis F. Chen,Jane P. Chang Book 2003 Springer Science+Business Media New York 2003 Pl