开头 发表于 2025-4-1 05:35:53

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nascent 发表于 2025-4-1 07:17:39

Plasma Fundamentals,eated in the . of plasmas. Fortunately , with a few exceptions, the fluid theory of plasmas is all that is required to understand the behavior of low-temperature industrial plasmas, and the quantum mechanical effects of semiconducting solids also do not come into play.

Dawdle 发表于 2025-4-1 11:47:43

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悠然 发表于 2025-4-1 15:33:10

Inductively Coupled Plasmas (ICPs),ar to the antenna current, but the E-field is more or less parallel to the antenna current and opposite to it. Thus, with a slinky-shaped antenna, the E-field in the plasma would be in the azimuthal direction.

instructive 发表于 2025-4-1 21:14:07

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发微光 发表于 2025-4-2 00:37:52

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高兴一回 发表于 2025-4-2 03:12:13

Book 2003 up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes..This short book is ideal for new workers in the semiconductor indus
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查看完整版本: Titlebook: Lecture Notes on Principles of Plasma Processing; Francis F. Chen,Jane P. Chang Book 2003 Springer Science+Business Media New York 2003 Pl