PEL 发表于 2025-3-21 18:51:00

书目名称Dry Etching for VLSI影响因子(影响力)<br>        http://figure.impactfactor.cn/if/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI影响因子(影响力)学科排名<br>        http://figure.impactfactor.cn/ifr/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI网络公开度<br>        http://figure.impactfactor.cn/at/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI网络公开度学科排名<br>        http://figure.impactfactor.cn/atr/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI被引频次<br>        http://figure.impactfactor.cn/tc/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI被引频次学科排名<br>        http://figure.impactfactor.cn/tcr/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI年度引用<br>        http://figure.impactfactor.cn/ii/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI年度引用学科排名<br>        http://figure.impactfactor.cn/iir/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI读者反馈<br>        http://figure.impactfactor.cn/5y/?ISSN=BK0283256<br><br>        <br><br>书目名称Dry Etching for VLSI读者反馈学科排名<br>        http://figure.impactfactor.cn/5yr/?ISSN=BK0283256<br><br>        <br><br>

鸣叫 发表于 2025-3-21 20:57:30

http://reply.papertrans.cn/29/2833/283256/283256_2.png

高调 发表于 2025-3-22 02:40:17

http://reply.papertrans.cn/29/2833/283256/283256_3.png

constitutional 发表于 2025-3-22 07:55:24

https://doi.org/10.1007/978-3-030-36766-4ng. In fact, certain diagnostic methods are a prerequisite for precise control of etching processes. Over the years a large number of techniques have been developed; these usually require some in situ “sensor” to measure the etch rates or to detect the endpoint when a film has been etched through to expose the underlying material.

夹死提手势 发表于 2025-3-22 10:45:01

http://reply.papertrans.cn/29/2833/283256/283256_5.png

creditor 发表于 2025-3-22 14:59:14

http://reply.papertrans.cn/29/2833/283256/283256_6.png

creditor 发表于 2025-3-22 18:56:25

http://reply.papertrans.cn/29/2833/283256/283256_7.png

不确定 发表于 2025-3-22 23:15:05

http://reply.papertrans.cn/29/2833/283256/283256_8.png

Hyperalgesia 发表于 2025-3-23 02:54:34

The Plasma State,remely low, namely about 10. at room temperature. Not much, but it is there, and room-temperature air is certainly not a plasma. A useful definition for the plasma state has been postulated by Chen ,

MEN 发表于 2025-3-23 07:08:20

http://reply.papertrans.cn/29/2833/283256/283256_10.png
页: [1] 2 3 4
查看完整版本: Titlebook: Dry Etching for VLSI; A. J. Roosmalen,J. A. G. Baggerman,S. J. H. Brader Book 1991 Springer Science+Business Media New York 1991 Plasma.VL