Submitted on: 23 September 1998.
Revised on: 03 January 1999.
Accepted on: 10 February 1999.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 27 May 1999.
Revised on: 17 July 1999.
Accepted on: 16 August 1999.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 22 June 2015.
Revised on: 29 July 2015.
Accepted on: 24 August 2015.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 17 July 2012.
Revised on: 30 October 2012.
Accepted on: 03 December 2012.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING