Submitted on: 15 December 2001.
Revised on: 08 February 2002.
Accepted on: 07 March 2002.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 08 December 2019.
Revised on: 08 February 2020.
Accepted on: 04 April 2020.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 29 September 2017.
Revised on: 02 January 2018.
Accepted on: 29 January 2018.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Submitted on: 24 July 2000.
Revised on: 12 November 2000.
Accepted on: 26 November 2000.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 08 May 2022.
Revised on: 23 June 2022.
Accepted on: 24 July 2022.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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Submitted on: 28 January 2005.
Revised on: 17 March 2005.
Accepted on: 25 April 2005.
___________________JOURNAL OF MICROMECHANICS AND MICROENGINEERING